[G-7-3] Improved electrical characteristics of Pt/Gd2O3/GaAs MOS capacitors with surface preparation procedures

Chao-Ching Cheng、Chao-Hsin Chien、Guang-Li Luo、Chih-Kuo Tseng、Hsin-Che Chiang、Chun-Hui Yang、Chun-Yen Chang (1.Institute of Electronics, National Chiao-Tung University、2.National Nano Device Laboratory)

https://doi.org/10.7567/SSDM.2007.G-7-3