Highly Reliable Bottom-Contact Pentacene TFTs with a Poly(p-chloroxylylene) Layer Selectively Grown on a Gate-Insulator

Ryoichi Yasuda; Nobukazu Hirai; Iwao Yagi; Kazumasa Nomoto; Jiro Kasahara; Takeo Minari; Kazuhito Tsukagoshi; Yoshinobu Aoyagi

doi:https://doi.org/10.7567/SSDM.2007.H-9-2

2007 International Conference on Solid State Devices and Materials

Sep 18, 2007 - Sep 21, 2007
Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan

[H-9-2] Highly Reliable Bottom-Contact Pentacene TFTs with a Poly(p-chloroxylylene) Layer Selectively Grown on a Gate-Insulator

Ryoichi Yasuda, Nobukazu Hirai, Iwao Yagi, Kazumasa Nomoto, Jiro Kasahara, Takeo Minari, Kazuhito Tsukagoshi, Yoshinobu Aoyagi (1.Sony Corporation, Materials Laboratory, 2.RIKEN)

https://doi.org/10.7567/SSDM.2007.H-9-2

▲