Highly Reliable Bottom-Contact Pentacene TFTs with a Poly(p-chloroxylylene) Layer Selectively Grown on a Gate-Insulator

Ryoichi Yasuda; Nobukazu Hirai; Iwao Yagi; Kazumasa Nomoto; Jiro Kasahara; Takeo Minari; Kazuhito Tsukagoshi; Yoshinobu Aoyagi

doi:https://doi.org/10.7567/SSDM.2007.H-9-2

2007 International Conference on Solid State Devices and Materials

2007年9月18日〜 2007年9月21日
Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan

[H-9-2] Highly Reliable Bottom-Contact Pentacene TFTs with a Poly(p-chloroxylylene) Layer Selectively Grown on a Gate-Insulator

Ryoichi Yasuda、Nobukazu Hirai、Iwao Yagi、Kazumasa Nomoto、Jiro Kasahara、Takeo Minari、Kazuhito Tsukagoshi、Yoshinobu Aoyagi (1.Sony Corporation, Materials Laboratory、2.RIKEN)

https://doi.org/10.7567/SSDM.2007.H-9-2

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