Self-Aligned Dual-Gate Single-Electron Transistors (DG-SETs)

Sangwoo Kang; Dae-Hwan Kim; Il-Han Park; Jin-Ho Kim; Joung-eob Lee; Jong-Duk Lee; Byung-Gook Park

doi:https://doi.org/10.7567/SSDM.2007.I-10-3

[I-10-3] Self-Aligned Dual-Gate Single-Electron Transistors (DG-SETs)

Sangwoo Kang, Dae-Hwan Kim, Il-Han Park, Jin-Ho Kim, Joung-eob Lee, Jong-Duk Lee, Byung-Gook Park (1.Inter-University Semiconductor Research Center and School of Electrical Engineering and Computer Science, Seoul National University, 2.School of Electrical Engineering, Kookmin University)

https://doi.org/10.7567/SSDM.2007.I-10-3

2007 International Conference on Solid State Devices and Materials

[I-10-3] Self-Aligned Dual-Gate Single-Electron Transistors (DG-SETs)