[I-10-3] Self-Aligned Dual-Gate Single-Electron Transistors (DG-SETs)

Sangwoo Kang、Dae-Hwan Kim、Il-Han Park、Jin-Ho Kim、Joung-eob Lee、Jong-Duk Lee、Byung-Gook Park (1.Inter-University Semiconductor Research Center and School of Electrical Engineering and Computer Science, Seoul National University、2.School of Electrical Engineering, Kookmin University)

https://doi.org/10.7567/SSDM.2007.I-10-3