[I-2-5L] Fabrication of Two-Layer stacked Poly-Si TFT CMOS Inverters Using Laser Crystallized channel with metal gate on Si Substrate

Soon-Young Oh, Chang-Geun Ahn, Jong-Heon Yang, Woo-Hyun Lee, Won-Ju Cho, Moon-Gyu Jang (1.Nano-Bio Electronic Devices Team, Electronics and Telecommunications Research Institute, 2.Electronics materials, Kwangwoon University)

https://doi.org/10.7567/SSDM.2007.I-2-5L