[J-1-2] URCAT (U-shaped-Recess-Channel-Array Transistor) Technology for 60nm DRAM and beyond

Chihoon Lee, J.C. Park, S. H. Park, S. S. Lee, S. D. Hong, I. G. Kim, Y. J. Choi, T. W. Lee, G. Y. Jin, Kinam Kim (1.DRAM PM Center, DRAM PA Team, 2.CAE, 3.Samsung Electronics Co.)

https://doi.org/10.7567/SSDM.2007.J-1-2