[J-1-3] RC-FinFET (Recessed Channel FinFET) Cell Transistor Technology for Future Generation DRAMs

Makoto Yoshida, Jae-Rok Kahng, Joon-Seok Moon, Kyoung-Ho Jung, Keunnam Kim, Hyunju Sung, Chul Lee, Chang-Kyu Kim, Wouns Yang, Donggun Park (1.Advanced Technology Development Team 1, 2.Semiconductor R&D Center, 3.Samsung Electronics Co.)

https://doi.org/10.7567/SSDM.2007.J-1-3