The Japan Society of Applied Physics

[J-10-2] Self-aligned Fabrication Process for Pd-Contacted and PMMA-Passivated Carbon Nanotube Field-Effect Transistors

Lorraine Rispal, Hongyu Yang, Rudolf Heller, Gisela Hess, Gerhard Tzschockel, Udo Schwalke (1.Institute for Semiconductor Technology, Darmstadt University of Technology)

https://doi.org/10.7567/SSDM.2007.J-10-2