The Japan Society of Applied Physics

[J-2-4] Memory Window Enhancement of MOS Memory Devices with High Density Self-Assembled Tungsten Nano-dot

Yanli Pei, Takafumi Fukushima, Tetsu Tanaka, Mitsumasa Koyanagi (1.International Advanced Research and Education Organization, Tohoku University, 2.Dept. of Bioengineering and Robotics, Graduate School of Engineering, Tohoku University)

https://doi.org/10.7567/SSDM.2007.J-2-4