The Japan Society of Applied Physics

[P-1-10] Crystalline and electrical properties of mictamict TiSiN gate MOS capacitors

Kouhei Furumai、Hiroki Kondo、Mitsuo Sakashita、Akira Sakai、Masaki Ogawa、Shigeaki Zaima (1.Graduate School of Engineering, Nagoya University、2.Nagoya University, Ecotopia Science Institute、3.Graduate School of Engineering Science, Osaka University)

https://doi.org/10.7567/SSDM.2007.P-1-10