Crystalline and electrical properties of mictamict TiSiN gate MOS capacitors

Kouhei Furumai; Hiroki Kondo; Mitsuo Sakashita; Akira Sakai; Masaki Ogawa; Shigeaki Zaima

doi:https://doi.org/10.7567/SSDM.2007.P-1-10

2007 International Conference on Solid State Devices and Materials

2007年9月18日〜 2007年9月21日
Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan

[P-1-10] Crystalline and electrical properties of mictamict TiSiN gate MOS capacitors

Kouhei Furumai、Hiroki Kondo、Mitsuo Sakashita、Akira Sakai、Masaki Ogawa、Shigeaki Zaima (1.Graduate School of Engineering, Nagoya University、2.Nagoya University, Ecotopia Science Institute、3.Graduate School of Engineering Science, Osaka University)

https://doi.org/10.7567/SSDM.2007.P-1-10

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