[P-1-14] TiN Gate Work Function Control Using Nitrogen Gas Flow Ratio and RTA-Temperature

Y. X. Liu, T. Hayashida, T. Matsukawa, K. Endo, M. Masahara, S. Ouchi, K. Sakamoto, K. Ishii, J. Tsukada, Y. Ishikawa, H. Yamauchi, A. Ogura, E. Suzuki (1.National Institute of Advanced Industrial Science and Technology (AIST), 2.School of Science and Technology, Meiji University)

https://doi.org/10.7567/SSDM.2007.P-1-14