[P-1-16] Full Range Work Function Modulation by Nitrogen Incorporation in Hf-Mo Binary Alloys Gate Electrode

Chao-Sung Lai, Chin-Wei Huang, Hsing-Kan Peng, Chih-Hsin Chen, Yu-Ching Fang, Li Hsu, Hui-Chun Wang, Chung-Yuan Lee, Shian-Jyh Lin (1.Department of Electronic Engineering, Chang Gung University, 2.Chung-Shan Institute of Science & Technology Materials & Electro-Optics Research Division, 3.Nanya Technology Corporation)

https://doi.org/10.7567/SSDM.2007.P-1-16