[P-1-16] Full Range Work Function Modulation by Nitrogen Incorporation in Hf-Mo Binary Alloys Gate Electrode

Chao-Sung Lai、Chin-Wei Huang、Hsing-Kan Peng、Chih-Hsin Chen、Yu-Ching Fang、Li Hsu、Hui-Chun Wang、Chung-Yuan Lee、Shian-Jyh Lin (1.Department of Electronic Engineering, Chang Gung University、2.Chung-Shan Institute of Science & Technology Materials & Electro-Optics Research Division、3.Nanya Technology Corporation)

https://doi.org/10.7567/SSDM.2007.P-1-16