[P-1-22] Schottky Barrier Height Modulation for Nickel Silicide on n-Si (100) using Antimony (Sb) Segregation

Hoong-Shing Wong、Lap Chan、Ganesh Samudra、Yee-Chia Yeo (1.Silicon Nano Device Lab., Department of Electrical and Computer Engineering, National University of Singapore)

https://doi.org/10.7567/SSDM.2007.P-1-22