[P-1-6] In-Situ Fluorinated Low-Temperature Polycrystalline Silicon (LTPS) Thin-Film Transistors (TFT) with Low Trapping and Off Current by CF4 Plasma

Wen-Hsiang Sung, Chyuan-Haur Kao, Hsing-Kan Peng, Shang-Feng Huang, Wen-Fa Tsai, Chi-Fong Ai, Chih-Rong Chen, Chao-Sung Lai (1.Department of Electronic Engineering, Chang Gung University, 2.Physics Division, Institution of Nuclear Energy Research, 3.Material Science Service Corporation)

https://doi.org/10.7567/SSDM.2007.P-1-6