[P-1-7] Improvement of Electrical Characteristics for Novel Fluorine-Incorporated Poly-Si TFTs with TiN Gate Electrode and Pr2O3 Gate Dielectric

Chia-Wen Chang、Jiun-Jia Huang、Hong-Ren Chang、Jam-Wem Lee、Tan-Fu Lei (1.Institute of Electronics, National Chiao-Tung University、2.Taiwan Semiconductor Manufacturing Company)

https://doi.org/10.7567/SSDM.2007.P-1-7