[P-1-7] Improvement of Electrical Characteristics for Novel Fluorine-Incorporated Poly-Si TFTs with TiN Gate Electrode and Pr2O3 Gate Dielectric

Chia-Wen Chang, Jiun-Jia Huang, Hong-Ren Chang, Jam-Wem Lee, Tan-Fu Lei (1.Institute of Electronics, National Chiao-Tung University, 2.Taiwan Semiconductor Manufacturing Company)

https://doi.org/10.7567/SSDM.2007.P-1-7