[P-3-8] Combined Effects of an Epitaxial Ge Channel and Si Substrate on Ge-on-Si MOS Capacitors and Field Effect Transistors

Jungwoo Oh, Prashant Majhi, Hideok Lee, Se-Hoon Lee, Sanjay Banerjee, Pankaj Kalra, Rusty Harris, Hsing-Huang Tseng, Raj Jammy (1.SEMATECH, 2.University of Texas at Austin, 3.University of California at Berkeley, 4.Chungnam National University Korea)

https://doi.org/10.7567/SSDM.2007.P-3-8