[P-3-8] Combined Effects of an Epitaxial Ge Channel and Si Substrate on Ge-on-Si MOS Capacitors and Field Effect Transistors

Jungwoo Oh、Prashant Majhi、Hideok Lee、Se-Hoon Lee、Sanjay Banerjee、Pankaj Kalra、Rusty Harris、Hsing-Huang Tseng、Raj Jammy (1.SEMATECH、2.University of Texas at Austin、3.University of California at Berkeley、4.Chungnam National University Korea)

https://doi.org/10.7567/SSDM.2007.P-3-8