Hydrogen-Sensing Behaviors of an InAlAs-Based Schottky Diode with a Pt Catalytic Thin Film

Ching-Wen Hung; Huey-Ing Chen; Tzu-Pin Chen; Tsung-Han Tsai; Wen-Chau Liu

doi:https://doi.org/10.7567/SSDM.2007.P-6-10

2007 International Conference on Solid State Devices and Materials

2007年9月18日〜 2007年9月21日
Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan

[P-6-10] Hydrogen-Sensing Behaviors of an InAlAs-Based Schottky Diode with a Pt Catalytic Thin Film

Ching-Wen Hung、Huey-Ing Chen、Tzu-Pin Chen、Tsung-Han Tsai、Wen-Chau Liu (1.Institute of Microelectronics, Department of Electrical Engineering, National Cheng-Kung University、2.Department of Chemical Engineering, National Cheng-Kung University)

https://doi.org/10.7567/SSDM.2007.P-6-10

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