[P-8-3] Vanadium Dioxide Films Deposited on SiO2- and Al2O3-coated Si Substrates Using Reactive RF-Magnetron Sputter Deposition Technique

Sun Jin Yun、Jung Wook Lim、Byung-Gyu Chae、Hyun-Tak Kim (1.Terahertz Devices Team, Electronics and Telecommunications Research Institute)

https://doi.org/10.7567/SSDM.2007.P-8-3