[P-9-10] Novel Vacuum Encapsulation Applied for Improving Short-Channel Immunity on Poly-Si Thin Film Transistors

Ta-Chuan Liao、Chun-Yu Wu、Shih-Wei Tu、Feng-Tso Chien、Wei-Kai Lin、Jame-Chin Liu、Hsia-Wei Chen、Chan-Ching Lin、Huang-Chung Cheng (1.Institute of Electronics, National Chiao Tung University、2.Department of Electronic Engineering, Feng Chia University)

https://doi.org/10.7567/SSDM.2007.P-9-10