[P-9-10] Novel Vacuum Encapsulation Applied for Improving Short-Channel Immunity on Poly-Si Thin Film Transistors

Ta-Chuan Liao, Chun-Yu Wu, Shih-Wei Tu, Feng-Tso Chien, Wei-Kai Lin, Jame-Chin Liu, Hsia-Wei Chen, Chan-Ching Lin, Huang-Chung Cheng (1.Institute of Electronics, National Chiao Tung University, 2.Department of Electronic Engineering, Feng Chia University)

https://doi.org/10.7567/SSDM.2007.P-9-10