[A-1-5] Reaction Kinetics Control on Thermal Oxidation Process of Ge in High Pressure Oxygen

C. H. Lee¹, T. Nishimura¹, K. Nagashio¹, K. Kita¹, A. Toriumi¹ (1.Univ. of Tokyo, Japan)

https://doi.org/10.7567/SSDM.2008.A-1-5