[A-1-5] Reaction Kinetics Control on Thermal Oxidation Process of Ge in High Pressure Oxygen

C. H. Lee¹、T. Nishimura¹、K. Nagashio¹、K. Kita¹、A. Toriumi¹ (1.Univ. of Tokyo, Japan)

https://doi.org/10.7567/SSDM.2008.A-1-5