[A-6-2] Low Temperature Phosphorus Segregation at NiGe/Ge Interface by "Snowplow" Effect

T. Nishimura¹、S. Sakata¹、K. Nagashio¹、K. Kita¹、A. Toriumi¹ (1.Univ. of Tokyo, Japan)

https://doi.org/10.7567/SSDM.2008.A-6-2