[A-6-2] Low Temperature Phosphorus Segregation at NiGe/Ge Interface by "Snowplow" Effect

T. Nishimura¹, S. Sakata¹, K. Nagashio¹, K. Kita¹, A. Toriumi¹ (1.Univ. of Tokyo, Japan)

https://doi.org/10.7567/SSDM.2008.A-6-2