[A-7-1] Pushing Bulk Transistor with Conventional SiON Gate Oxide for Low Power Applications

G. Bidal^1,3, F. Boeuf¹, F. Payet¹, S. Denorme¹, N. Loubet¹, P. Perreau², C. Mezzomo^1,3, M. Marin¹, D. Fleury^1,3, C. Leyris¹, F. Leverd¹, P. Gouraud¹, C. Laviron², R. Beneyton¹, A. Torres², B. Imbert¹, D. Delille⁴, L. Clement¹, G. Ghibaudo³, T. Skotnicki¹ (1.STMicroelectronics, 2.CEA-LETI, 3.IMEP, France, 4.FEI, Netherlands)

https://doi.org/10.7567/SSDM.2008.A-7-1