[A-8-2] Improvement of Metal/High-k Device Performance by 40-Milli-Second Flash Lamp Annealing by using Flexibly-Shaped-Pulse Technology

T. Onizawa¹, S. Kato¹, T. Aoyama¹, Y. Nara¹, Y. Ohji¹ (1.Selete, Japan)

https://doi.org/10.7567/SSDM.2008.A-8-2