[A-8-2] Improvement of Metal/High-k Device Performance by 40-Milli-Second Flash Lamp Annealing by using Flexibly-Shaped-Pulse Technology

T. Onizawa¹、S. Kato¹、T. Aoyama¹、Y. Nara¹、Y. Ohji¹ (1.Selete, Japan)

https://doi.org/10.7567/SSDM.2008.A-8-2