[A-9-4] Metalorganic Chemical Vapor Deposition of High-Dielectric-Constant Praseodymium Oxide Films using a Liquid Cyclopentadienyl Precursor

H. Kondo¹, S. Sakurai¹, A. Sakai², M. Ogawa¹, S. Zaima¹ (1.Nagoya Univ., 2.Osaka Univ., Japan)

https://doi.org/10.7567/SSDM.2008.A-9-4