[A-9-4] Metalorganic Chemical Vapor Deposition of High-Dielectric-Constant Praseodymium Oxide Films using a Liquid Cyclopentadienyl Precursor

H. Kondo¹、S. Sakurai¹、A. Sakai²、M. Ogawa¹、S. Zaima¹ (1.Nagoya Univ.、2.Osaka Univ., Japan)

https://doi.org/10.7567/SSDM.2008.A-9-4