CMOSFET Featuring Atomically Flat Gate Insulator Film/Silicon Interface on (100) Orientation Surface

2008 International Conference on Solid State Devices and Materials

Sep 23, 2008 - Sep 26, 2008
Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan

R. Kuroda¹, A. Teramoto¹, T. Suwa¹, Y. Nakao¹, S. Sugawa¹, T. Ohmi^1,2 (1.Tohoku Univ., 2.WPI Research Center, Japan)