[B-9-5] Characteristics of Thin-Body <100> Channel SOI MOSFETs by using Two Step Elevated Silicon Eptaxtial Process K. Ishikawa1、T. Iwamatsu1、T. Terada1、H. Oda1、Y. Inoue1 (1.Renesas Tech. Corp., Japan) https://doi.org/10.7567/SSDM.2008.B-9-5