[C-2-4] Electrochemical Etching of Ru Film for Bevel Cleaning of BEOL

H. Aoki¹, D. Watanabe¹, N. Ooi¹, J. Jong-Hyeon¹, C. Kimura¹, T. Sugino¹ (1.Osaka Univ., Japan)

https://doi.org/10.7567/SSDM.2008.C-2-4