[C-2-6] Suppression of Cu Oxidation using Environmentally Friendly Inhibitors in the Ambience of High Temperature and High Humidity for Cu/Low-K

M. Hara¹, D. Watanabe¹, C. Kimura¹, H. Aoki¹, T. Sugino¹ (1.Osaka Univ., Japan)

https://doi.org/10.7567/SSDM.2008.C-2-6