[C-6-2] Electrical Reliabilities of Highly Cross-Linked Porous Silica Film

Y. Kayaba¹、K. Kohmura²、H. Tanaka²、K. Kinoshita³、S. Chikaki³、T. Kikkawa¹ (1.Hiroshima Univ.、2.Mitsui Chemicals, Inc.、3.Selete, Japan)

https://doi.org/10.7567/SSDM.2008.C-6-2