[C-6-2] Electrical Reliabilities of Highly Cross-Linked Porous Silica Film

Y. Kayaba¹, K. Kohmura², H. Tanaka², K. Kinoshita³, S. Chikaki³, T. Kikkawa¹ (1.Hiroshima Univ., 2.Mitsui Chemicals, Inc., 3.Selete, Japan)

https://doi.org/10.7567/SSDM.2008.C-6-2