[C-7-1] Low-Loss Magnetic Films of Ni-Zn Ferrite by Low-Temperature PVD Method for RF-CMOS Application

K. Kaneko¹、N. Inoue¹、N. Furutake¹、K. Hijioka¹、Y. Hayashi¹ (1.NEC Electronics Corp., Japan)

https://doi.org/10.7567/SSDM.2008.C-7-1