The Japan Society of Applied Physics

[C-8-3] Development of Multi-Scale Electromigration Simulator using Ultra Accelerated Quantum Chemical Molecular Dynamics and a Kinetic Monte Carlo Method and its Application to Cu Interconnect

H. Tsuboi1, A. Chutia1, C. Lv1, Z. Zhu1, R. Miura1, A. Suzuki1, R. Sahnoun1, M. Koyama1, N. Hatakeyama1, A. Endou1, H. Takaba1, C. A. Del Carpio1, R. C. Deka2, M. Kubo1, A. Miyamoto1 (1.Tohoku Univ., Japan, 2.Tezpur Univ., India)

https://doi.org/10.7567/SSDM.2008.C-8-3