[D-5-3] Method for Extracting RF Characteristics of CMOS-MEMS Inductors

K. Kuwabara¹、K. Ushiyama²、N. Sato¹、H. Morimura¹、J. Kodate¹、H. Ishii¹ (1.NTT Corp.、2.Shibaura Inst. of Tech., Japan)

https://doi.org/10.7567/SSDM.2008.D-5-3