[D-5-3] Method for Extracting RF Characteristics of CMOS-MEMS Inductors

K. Kuwabara¹, K. Ushiyama², N. Sato¹, H. Morimura¹, J. Kodate¹, H. Ishii¹ (1.NTT Corp., 2.Shibaura Inst. of Tech., Japan)

https://doi.org/10.7567/SSDM.2008.D-5-3