[D-7-3] Piezoresistive Rotation Angle Sensor Integrated in Micromirror Device

T. Aonuma¹, S. Kumagai¹, M. Sasaki¹, M. Tabata², K. Hane² (1.Toyota Technological Inst., 2.Tohoku Univ., Japan)

https://doi.org/10.7567/SSDM.2008.D-7-3