[D-7-3] Piezoresistive Rotation Angle Sensor Integrated in Micromirror Device

T. Aonuma¹、S. Kumagai¹、M. Sasaki¹、M. Tabata²、K. Hane² (1.Toyota Technological Inst.、2.Tohoku Univ., Japan)

https://doi.org/10.7567/SSDM.2008.D-7-3