[D-8-3] Diameter-controlled 2-dimensional Array of Si Nanodisk using Bio-nano-process and Neutral Beam Etching for Realistic Quantum Effect Devices

C. H. Huang¹, M. Igarashi¹, T. Kubota¹, M. Takeguchi², K. Nishioka³, Y. Uraoka⁴, T. Fuyuki⁴, I. Yamashita^4,5, S. Samukawa¹ (1.Tohoku Univ., 2.NIMS, 3.Univ. of Miyazaki, 4.NAIST, 5.Matsushita Electric Industrial Co., Ltd., Japan)

https://doi.org/10.7567/SSDM.2008.D-8-3