Development of Neural Probe with Microfluidic Channel Fabricated by using Wafer Direct Bonding Technique

2008 International Conference on Solid State Devices and Materials

Sep 23, 2008 - Sep 26, 2008
Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan

S. Kanno¹, R. Kobayashi¹, T. Fukushima¹, K. Sakamoto¹, N. Katayama¹, H. Mushiake¹, T. Tanaka¹, M. Koyanagi¹ (1.Tohoku Univ., Japan)