[D-8-4] Development of Neural Probe with Microfluidic Channel Fabricated by using Wafer Direct Bonding Technique

S. Kanno¹、R. Kobayashi¹、T. Fukushima¹、K. Sakamoto¹、N. Katayama¹、H. Mushiake¹、T. Tanaka¹、M. Koyanagi¹ (1.Tohoku Univ., Japan)

https://doi.org/10.7567/SSDM.2008.D-8-4