The Japan Society of Applied Physics

[D-8-5] Development of Si Double-sided Microelectrode for Platform of Brain Signal Processing System

R. Kobayashi1, S. Kanno1, T. Fukushima1, K. Sakamoto1, N. Katayama1, H. Mushiake1, T. Tanaka1, M. Koyanagi1 (1.Tohoku Univ., Japan)

https://doi.org/10.7567/SSDM.2008.D-8-5